Calculate the percentage by mass of silicon tetrachloride

The molar mass of silicon tetrachloride is 169.8 g/mol. The mass of silicon is 28.08 g/mol and the mass of chlorine is 35.45 g/mol.

Therefore, the percentage by mass of silicon in silicon tetrachloride is 28.08/169.8 x 100 = 16.6%.
The percentage by mass of chlorine in silicon tetrachloride is 35.45/169.8 x 100 = 20.9%.