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MEMS
Questions and answers by visitors named
MEMS
Questions (14)
----------------------- used to align wafers with the mask in mask aligner.
I. Linear translation in horizontal plane II.
1 answer
444 views
A layer of 2µm thick silicon dioxide is deposited on <100> silicon wafer. SiO2 layer is patterned using lithography and dipped
1 answer
630 views
An oxide coated silicon wafer is patterned (circle of 30 µm diameter) using photolithography and is dipped in HF. After 2
1 answer
467 views
After fabrication of cantilever array, it is found that it cannot meet expected efficiency. What are probable causes behind
1 answer
352 views
In ion-assisted etching process, CHF3 is used in:
Dry etching of silicon dioxide Dry etching of silicon nitride Wet etching of
3 answers
1,302 views
Critical dimension of a lithography system is given by:
Line width Spacing Contact dimension Minimum of these three
1 answer
493 views
Which of the following is false?
Contact mode lithography gives better resolution than other two modes In contact mode
1 answer
441 views
____________ used to align wafers with the mask in mask aligner.
I. Linear translation in horizontal plane II. Rotational motion
2 answers
565 views
Mask aligner is used to:
I. Alignment of wafer to mask II. Coat photoresist on wafer III. Expose the coated wafer IV. Developing
1 answer
476 views
Which of the following statement is true for projection mode of lithography?
As effect of diffraction of light is more, it
1 answer
991 views
Which one of this option shows the correct alignment of alignment marks on wafer and mask? [Consider blue marks as alignment
1 answer
426 views
Which of the following statement is true for the lift off process?
I. After lift off process, the material is deposited at the
2 answers
547 views
Non-invasive detection of breast cancer can be performed by detecting the increased concentration of _________ in a breath
3 answers
350 views
_______ are proposed as the potential biomarker of liver cancer
Methylmercaptan Hydrogen sulphide Di-methyl sulphide All of these
1 answer
358 views